JPH028355Y2 - - Google Patents
Info
- Publication number
- JPH028355Y2 JPH028355Y2 JP8167784U JP8167784U JPH028355Y2 JP H028355 Y2 JPH028355 Y2 JP H028355Y2 JP 8167784 U JP8167784 U JP 8167784U JP 8167784 U JP8167784 U JP 8167784U JP H028355 Y2 JPH028355 Y2 JP H028355Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- multipolar
- teeth
- electron beam
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 description 8
- 239000012212 insulator Substances 0.000 description 7
- 230000004075 alteration Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8167784U JPS60193656U (ja) | 1984-06-01 | 1984-06-01 | 多極電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8167784U JPS60193656U (ja) | 1984-06-01 | 1984-06-01 | 多極電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60193656U JPS60193656U (ja) | 1985-12-23 |
| JPH028355Y2 true JPH028355Y2 (en]) | 1990-02-28 |
Family
ID=30628680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8167784U Granted JPS60193656U (ja) | 1984-06-01 | 1984-06-01 | 多極電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60193656U (en]) |
-
1984
- 1984-06-01 JP JP8167784U patent/JPS60193656U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60193656U (ja) | 1985-12-23 |
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